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FEA for EDA (MEMS Design)

OOFELIE::Multiphysics solution by Excellence, it provides you with unique capabilities to analyze MEMS behavior. It uses multiple strongly coupled methods to compute your MEMS simulations fast and efficiently.
With OOFELIE::Multiphysics you are getting the core of the physics in one conveniently fully integrated simulation package.

FEA for EDA (MEMS Design)

Simulation results of a COMB drive. The results show the electrostatic forces and resulting displacements between different electrodes.

OOFELIE::Multiphysics provides a solution for fully coupled analysis. Any MEMS problem exhibits a more or less pronounced coupling behavior, resulting in the mutual influence of the structural - thermal - fluidic - electric fields. To obtain an accurate prediction of the response, a coupled approach is mandatory. OOFELIE::Multiphysics offers a built-in, simultaneous simulation engine for the whole system, thus providing a better solution accuracy for strongly coupled cases.
Reduced design time, improved quality and reduced costs are some of the benefits one can now obtain using OOFELIE::Multiphysics.

As described below, OOFELIE::Multiphysics proposes also many outputs and couplings with electronic boards design softwares so you keep a continuous work-flow.

Key Features

Design - Abilities
  • Statics
    • Linear and non-linear
  • Modal
  • Harmonic
  • Transient
    • Linear and non-linear
  • Random Vibrations
MEMS_brochure_2012 565,93 kB

Non linear behavior of electrostatically actuated micro-structures (LTAS - ULg)


Piezoelectric analysis

The general three-dimensional models offer generalized methods that can be adapted and used for many different applications in the transportation (aircraft, automotive), equipment (machinery, motors, sound systems), electronic appliances, biomedical and building industries for instance.

To accurately model the behavior of piezoelectric systems, the strong coupling between the mechanical and electrical fields is considered in the solution approach.

Electrostatic actuation

The electrostatic capabilities are dedicated to the modeling of the behavior of electrostatically actuated systems. This feature is very flexible thanks to the use of the conventional finite element method (FEM), together with the boundary element method (BEM). This last method is efficient for taking into account the contribution of infinite medium. Also, a Fast Multipole Method (FMM) algorithm can be used, in some specific cases, to solve very large electrostatic problems with BEM techniques.

Thermo-mechanical and pyro couplings

The Oofelie::MEMS product contains all the capabilities of the Oofelie::PyroPiezoElectric product, where the thermal field and its couplings with mechanical and electrical fields are taken into account in the strongly coupled analysis procedures.

For more information consult The Onera webpage (In French)

Fluid damping

For MEMS devices that are not packaged in a vacuum environment, the management of the surrounding fluid medium is mandatory. Indeed, it induces an additional damping effect that modifies the dynamic behaviour of the system. A BEM Stokes fluid incompressible formulation is implemented in Oofelie::MEMS to model this damping effect.

Super Element Models (SEM) generation

Thanks to the strong coupling approach, model reduction techniques are available to generate accurate but fast models of components that can be introduced in other electronics.
Efficient and innovative reduction methods have been developed in Oofelie, which allow the generation of parameterised multiphysics reduced models that are fully compatible with static, modal, dynamic and harmonic simulations. The use of reduced models can lead to significant improvements in terms of simulation time and memory requirements. Furthermore, the ability to re-use components and to generate models that represent families of components, thanks to the parameterisation features, can speed-up the time-to-market.
The reduction methods available in Oofelie can be applied to structural, thermo-mechanical, piezoelectric and thermo-piezoelectric models.
Due to the dynamic reduction approach, reduced models take into account the complete behavior of the models, including stiffness, inertial and damping effects. In addition, all the reduced model variables correspond to input-output quantities and therefore the excitation scheme must not be defined a priori when generating the reduced model.
Reduced models can also be exported to systems simulators using VHDL-AMS or Verilog-A exchange formats. It is also possible to add and connect multiple RLC circuit elements to model the connected circuitry directly inside Oofelie::Mems.


Bilayer-mirror (Thermal actuation)

This example is a thermically-actuated micro-mirror. This mirror is made of 2 layers with different thermal expansion coefficient. The thermal actuation is often used in MEMS since the small dimension of the system induces fast response to thermal excitation.

Electrostatic actuation

The electrostatic effect is very important in MEMS since it is generally the most important force inside them. For example, the pull-in voltage detection is an important characteristic in MEMS simulation to prove the stability of a MEMS design.