OOFELIE::Multiphysics - Engineering Standard Multiphysics Solutions / Applications / MEMS devices

MEMS devices

Capacitors in MEMS

Micromachined variable capacitors are used in RFMEMS, monolithic VCO's, accelerometers, gyroscopes and varactors.

Critical to the succes of coupled analysis of structural - thermal - fluidic – electric-optic fields inside semiconductor components, is the softMEMS integration inside widely used EDA designflows such CADENCE virtuoso, Tanner EDA, and EEsof ADS. Since it allows for co-simulation of the component inside the electrical circuit.

The Microsystem design flow: From Layout to Packaging


MEMS (Micro Electro Mechanical Systems) conquer our daily lives. They are everywhere: in our cars, at the doctor's office as well as in the plane that takes us to our vacation. But today it lacks an effective response to the demand for reliability of the different actors. In this lecture we will show you how a complete and systematic design flow for MEMS based systems will yield higher quality MEMS based microsystems that are able to operate in harsh environments (temperature, vibration, humidity, corrosion, high voltage ...) while being more power efficient, autonomous and reliable than the classic components they are replacing.

The Seminar was given by Open Engineering, TAIPRO Engineering and SoftMEMS

Bilayer-mirror (Thermal actuation)

This example is a thermically-actuated micro-mirror. This mirror is made of 2 layers with different thermal expansion coefficient. The thermal actuation is often used in MEMS since the small dimension of the system induces fast response to thermal excitation.

Electrostatic actuation

The electrostatic effect is very important in MEMS since it is generally the most important force inside them. For example, the pull-in voltage detection is an important characteristic in MEMS simulation to prove the stability of a MEMS design.

Bi-layer micro mirror (MOEMS)

This example illustrates a simulation of the opto-electro-thermo-mechanical actuation of a bi-layer micro-mirror. This mirror is composed of two layers made of materials with different thermal expansion coefficients. The extremity of an “arm” of the system is submitted to a given electric potential while the others have a null potential. Due to this difference of potential between the different extremities, a current appears through the system and causes heating by joule effect. Because the thermo-mechanical behavior of the two layers is different, a bending effect appears and it is possible to control the elevation of the device by modifying the applied voltage. The optical impact of mirror displacement is then obtained.