MEMS

This example is a thermically-actuated micro-mirror. This mirror is made of 2 layers with different thermal expansion coefficient. The thermal actuation is often used in MEMS since the small dimension of the system induces fast response to thermal excitation.

The electrostatic effect is very important in MEMS since it is generally the most important force inside them. For example, the pull-in voltage detection is an important characteristic in MEMS simulation to prove the stability of a MEMS design.