OOFELIE::Multiphysics | Transducers Design Solution | FSI Solution / Products / OOFELIE::Multiphysics for transducers & MEMS Design / FEA for EDA (MEMS Design) / Bilayer-mirror (Thermal actuation)

Bilayer-mirror (Thermal actuation)


Temperature and displacement fields in the micro-mirror

This example is a thermically-actuated micro-mirror. This mirror is made of 2 layers with different thermal expansion coefficient. The thermal actuation is often used in MEMS since the small dimension of the system induces fast response to thermal excitation.