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Bi-layer micro mirror (MOEMS)

MOEMS Displacement

MOEMS Displacement

This example illustrates a simulation of the opto-electro-thermo-mechanical actuation of a bi-layer micro-mirror. This mirror is composed of two layers made of materials with different thermal expansion coefficients. The extremity of an “arm” of the system is submitted to a given electric potential while the others have a null potential. Due to this difference of potential between the different extremities, a current appears through the system and causes heating by joule effect. Because the thermo-mechanical behavior of the two layers is different, a bending effect appears and it is possible to control the elevation of the device by modifying the applied voltage. The optical impact of mirror displacement is then obtained.