OOFELIE::Multiphysics | Transducers Design Solution | FSI Solution / Applications / MEMS devices / Electrostatic actuation

Electrostatic actuation

External electrical potential

External electrical potential

The electrostatic effect is very important in MEMS since it is generally the most important force inside them. For example, the pull-in voltage detection is an important characteristic in MEMS simulation to prove the stability of a MEMS design.

The example below is a micro-actuated plate where an electrical voltage is applied. The resulting electrostatic nodal forces and deformation of the plate are visualized on Figure 20 while electric potential distribution is given on figure on right.

Electrostatic nodal forces and displacements

Electrostatic nodal forces and displacements

Learn more about the MEMS product >>