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Capacitors in MEMS

Capacitors in MEMS

Typical set up for a parallel plate capacitor. A sensing capacitor plate is suspended in parallel with a referenec plate. The sensing plate is able to move relative to the reference plate.

Micromachined variable capacitors are used in RFMEMS, monolithic VCO's, accelerometers, gyroscopes and varactors.

Critical to the succes of coupled analysis of structural - thermal - fluidic – electric-optic fields inside semiconductor components, is the softMEMS integration inside widely used EDA designflows such CADENCE virtuoso, Tanner EDA, and EEsof ADS. Since it allows for co-simulation of the component inside the electrical circuit.

capacitifs1

Typical set up for a parallel plate capacitor. A sensing capacitor plate is suspended in parallel with a referenec plate. The sensing plate is able to move relative to the reference plate.

dflow

Oofelie has a complete flow that enables to translate the ECAD layout in full 3D structures and to output to circuit simulation tools.

reint3D

To re-integrate the 3D electro-mechanic model into the circuit desing, we use the “Super Element modelling” capabilities in Oofelie.

SEM

Reduced order modelling will reduce the complex 3D electro-mechanic model that includes interconnects, via’s and semiconductor layers to a verilogA or vhdl Super Element model to be included in the electric simulations.