MEMS

MEMS (Micro Electro Mechanical Systems) conquer our daily lives. They are everywhere: in our cars, at the doctor's office as well as in the plane that takes us to our vacation. But today it lacks an effective response to the demand for reliability of the different actors. In this lecture we will show you how a complete and systematic design flow for MEMS based systems will yield higher quality MEMS based microsystems that are able to operate in harsh environments (temperature, vibration, humidity, corrosion, high voltage ...) while being more power efficient, autonomous and reliable than the classic components they are replacing.

The Seminar was given by Open Engineering, TAIPRO Engineering and SoftMEMS

这个例子是一个热驱动微镜像。此镜像是由两层不同热胀系数的材料构成。微电子系统经常采用热驱动模拟，因为系统的小波动就可能快速引发热激振。

静电作用在微机电系统中是非常重要的，因为它通常是最重要的作用力。例如， 吸附电压检测是MEMS模拟测检微机电系统设计稳定性的重要内容。