静电驱动
External electrical potential
静电作用在微机电系统中是非常重要的，因为它通常是最重要的作用力。例如， 吸附电压检测是MEMS模拟测检微机电系统设计稳定性的重要内容。
The example below is a micro-actuated plate where an electrical voltage is applied. The resulting electrostatic nodal forces and deformation of the plate are visualized on Figure 20 while electric potential distribution is given on figure on right.
Electrostatic nodal forces and displacements