Multiphysics for designers / Applications / MEMS devices

MEMS devices

微机电系统中的电容器

微机械可变电容器被用于射频微机电系统,单片电压控制振动器,加速度计,陀螺仪和变容二极管。

如果您想对半导体元件进行结构-热-流体-电-光等场的耦合模拟,您需要把CADENCE virtuoso, Tanner EDA,和EEsof ADS等电子自动化工具相结合使用,因为这样就允许同时模拟电子元件中的所有部件。

The Microsystem design flow: From Layout to Packaging

intropic

MEMS (Micro Electro Mechanical Systems) conquer our daily lives. They are everywhere: in our cars, at the doctor's office as well as in the plane that takes us to our vacation. But today it lacks an effective response to the demand for reliability of the different actors. In this lecture we will show you how a complete and systematic design flow for MEMS based systems will yield higher quality MEMS based microsystems that are able to operate in harsh environments (temperature, vibration, humidity, corrosion, high voltage ...) while being more power efficient, autonomous and reliable than the classic components they are replacing.

The Seminar was given by Open Engineering, TAIPRO Engineering and SoftMEMS

双层镜像

这个例子是一个热驱动微镜像。此镜像是由两层不同热胀系数的材料构成。微电子系统经常采用热驱动模拟,因为系统的小波动就可能快速引发热激振。

静电驱动

静电作用在微机电系统中是非常重要的,因为它通常是最重要的作用力。例如, 吸附电压检测是MEMS模拟测检微机电系统设计稳定性的重要内容。

Bi-layer micro mirror (MOEMS)

This example illustrates a simulation of the opto-electro-thermo-mechanical actuation of a bi-layer micro-mirror. This mirror is composed of two layers made of materials with different thermal expansion coefficients. The extremity of an “arm” of the system is submitted to a given electric potential while the others have a null potential. Due to this difference of potential between the different extremities, a current appears through the system and causes heating by joule effect. Because the thermo-mechanical behavior of the two layers is different, a bending effect appears and it is possible to control the elevation of the device by modifying the applied voltage. The optical impact of mirror displacement is then obtained.